Titanium nitride prepared by plasma-based titanium-ion implantation
نویسندگان
چکیده
منابع مشابه
Blood Compatibility of Titanium-Based Coatings Prepared by Metal Plasma Immersion Ion Implantation and Deposition
In this work the suitability of some Tibased coatings as coating for blood-contacting implants is analyzed. Layers of pure Ti, Ti nitride, Ti oxynitrides (TiN1-xOx with x = 0.25, 0.50, and 0.75) and Ti oxides were deposited from a plasma produced by cathodic arc evaporation under addition of N2 and/or O2. The oxynitrides are crystalline with the fcc structure of TiN up to x = 0.25. For x = 0.5 ...
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We have investigated the surface bioactivity of titanium after water and hydrogen plasma immersion ion implantation. Plasma immersion ion implantation (PIII) excels in the surface treatment of components possessing a complicated shape such as medical implants. In addition, water and hydrogen PIII has been extensively studied as a method to fabricate silicon-on-insulator (SOI) substrates in the ...
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ژورنال
عنوان ژورنال: Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures
سال: 1999
ISSN: 0734-211X
DOI: 10.1116/1.590648